Campbell, S. A. The science and engineering of microelectronic fabrication /Stephen A. Campbell. Oxford University Press.
Trích dẫn kiểu ChicagoCampbell, Stephen A.,1954-. The Science and Engineering of Microelectronic Fabrication /Stephen A. Campbell. Oxford University Press.
Trích dẫn MLACampbell, Stephen A.,1954-. The Science and Engineering of Microelectronic Fabrication /Stephen A. Campbell. Oxford University Press.
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