Simulating the warping of thin coated Si wafers using Ansys layered shell elements /J. Schicker ⇑ , W.A. Khan
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huce-https:--thuvien.huce.edu.vn-Opac-DmdInfo.aspx?dmd_id=175452017-10-11Simulating the warping of thin coated Si wafers using Ansys layered shell elements /J. Schicker ⇑ , W.A. KhanSchicker,J. Anisotropic materialThin-film-on-substratestexthttps://thuvien.huce.edu.vn/Opac/DmdInfo.aspx?dmd_id=17545vie |
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Trường Đại học Xây dựng Hà Nội |
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vie |
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Anisotropic material Thin-film-on-substrates |
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Anisotropic material Thin-film-on-substrates Schicker,J. Simulating the warping of thin coated Si wafers using Ansys layered shell elements /J. Schicker ⇑ , W.A. Khan |
format |
text |
author |
Schicker,J. |
author_facet |
Schicker,J. |
author_sort |
Schicker,J. |
title |
Simulating the warping of thin coated Si wafers using Ansys layered
shell elements
/J. Schicker
⇑
, W.A. Khan |
title_short |
Simulating the warping of thin coated Si wafers using Ansys layered
shell elements
/J. Schicker
⇑
, W.A. Khan |
title_full |
Simulating the warping of thin coated Si wafers using Ansys layered
shell elements
/J. Schicker
⇑
, W.A. Khan |
title_fullStr |
Simulating the warping of thin coated Si wafers using Ansys layered
shell elements
/J. Schicker
⇑
, W.A. Khan |
title_full_unstemmed |
Simulating the warping of thin coated Si wafers using Ansys layered
shell elements
/J. Schicker
⇑
, W.A. Khan |
title_sort |
simulating the warping of thin coated si wafers using ansys layered
shell elements
/j. schicker
⇑
, w.a. khan |
url |
https://thuvien.huce.edu.vn/Opac/DmdInfo.aspx?dmd_id=17545 |
work_keys_str_mv |
AT schickerj simulatingthewarpingofthincoatedsiwafersusingansyslayeredshellelementsjschickerwakhan |
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