Simulating the warping of thin coated Si wafers using Ansys layered shell elements /J. Schicker ⇑ , W.A. Khan

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spelling huce-https:--thuvien.huce.edu.vn-Opac-DmdInfo.aspx?dmd_id=175452017-10-11Simulating the warping of thin coated Si wafers using Ansys layered shell elements /J. Schicker ⇑ , W.A. KhanSchicker,J. Anisotropic materialThin-film-on-substratestexthttps://thuvien.huce.edu.vn/Opac/DmdInfo.aspx?dmd_id=17545vie
institution Trường Đại học Xây dựng Hà Nội
collection LibHUCE
language vie
topic Anisotropic material
Thin-film-on-substrates
spellingShingle Anisotropic material
Thin-film-on-substrates
Schicker,J.
Simulating the warping of thin coated Si wafers using Ansys layered shell elements /J. Schicker ⇑ , W.A. Khan
format text
author Schicker,J.
author_facet Schicker,J.
author_sort Schicker,J.
title Simulating the warping of thin coated Si wafers using Ansys layered shell elements /J. Schicker ⇑ , W.A. Khan
title_short Simulating the warping of thin coated Si wafers using Ansys layered shell elements /J. Schicker ⇑ , W.A. Khan
title_full Simulating the warping of thin coated Si wafers using Ansys layered shell elements /J. Schicker ⇑ , W.A. Khan
title_fullStr Simulating the warping of thin coated Si wafers using Ansys layered shell elements /J. Schicker ⇑ , W.A. Khan
title_full_unstemmed Simulating the warping of thin coated Si wafers using Ansys layered shell elements /J. Schicker ⇑ , W.A. Khan
title_sort simulating the warping of thin coated si wafers using ansys layered shell elements /j. schicker ⇑ , w.a. khan
url https://thuvien.huce.edu.vn/Opac/DmdInfo.aspx?dmd_id=17545
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